UV TUBE LENS & NIR OPTICS

UV Tube Lens


CMM0.7X-UV

- Wavelength : 266~550nm
- Critical dimension measurement application with UV objective.
- UV Koehler illumination with UV illumination lens.

CMM0.8X-UV

- Wavelength : 350~600nm
- High resolution application compared to visible wavelength(With NUV objective lens)
- Visible Koehler illumination(Good for UV back light illumination)



NIR Optics

This series have designed for a wavelength band of 770nm to 1200nm that is used for with Near-Infrared(NIR).
It is good for the wafer pick-up and chip bonding inspection which is in-wafer defects and rear pattern with IR camera


Model Mag W.D
(mm)
Resolution
(um)
N.A F/# D.O.F
(mm)
Telecentricity
(Degree)
Optical
Distortion
(%)
Sensor Size(mm)
(Diagonal Length)
Mount Download
NTL0.34X-434I-12K-NIR 0.3X 434 25.4 0.024 6.25 1.4 0.03 12K(5um) M57 PDF CAD
TCL4.0X-80-NIR-11 4.0X 80 4.4 0.14 14.3 53.6um 0.03 0.085 2/3"(11mm) C PDF CAD
TCL4.8X-80D-NIR-11 4.8X 80 4.4 0.14 17.1 45um 0.03 0.05 2/3"(11mm) C PDF CAD
TCL4.8X-80-NIR-11 4.8X 80 4.4 0.14 17.1 45um 0.03 0.05 2/3"(11mm) C PDF CAD
TCL6.0X-80D-NIR-11 6.0X 80 4.1 0.15 20 33um 0.03 0.085 2/3"(11mm) C PDF CAD
TCL4.0X-80D-NIR-11 4.0X 80 4.4 0.14 14.3 53.6um 0.03 0.085 2/3"(11mm) C PDF CAD